4/1/2011	8:44:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	8:44:52 AM	Recipe started at 8:44 AM
4/1/2011	8:44:52 AM	H2 valve closed
4/1/2011	8:44:52 AM	BCl3 valve closed
4/1/2011	8:44:52 AM	PH3 valve closed
4/1/2011	8:44:52 AM	SiCl4 pre valve closed
4/1/2011	8:44:52 AM	SiCl4 post valve closed
4/1/2011	8:44:52 AM	Main Vac valve closed
4/1/2011	8:44:52 AM	Bypass valve closed
4/1/2011	8:44:52 AM	Bubbler valve closed
4/1/2011	8:44:52 AM	Helium valve opened
4/1/2011	8:44:52 AM	Helium MFC set to  500.000000
4/1/2011	8:44:52 AM	H2 MFC set to  0.000000
4/1/2011	8:44:52 AM	BCl3 MFC set to  0.000000
4/1/2011	8:44:52 AM	PHl3 MFC set to  0.000000
4/1/2011	8:44:52 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:44:52 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:44:52 AM	Tube furnace set to 0
4/1/2011	8:46:12 AM	Helium valve closed
4/1/2011	8:46:12 AM	H2 valve closed
4/1/2011	8:46:12 AM	BCl3 valve closed
4/1/2011	8:46:12 AM	PH3 valve closed
4/1/2011	8:46:12 AM	SiCl4 pre valve closed
4/1/2011	8:46:12 AM	SiCl4 post valve closed
4/1/2011	8:46:12 AM	Main Vac valve closed
4/1/2011	8:46:12 AM	Bypass valve closed
4/1/2011	8:46:12 AM	Bubbler valve closed
4/1/2011	8:46:12 AM	Helium MFC set to  0.000000
4/1/2011	8:46:12 AM	H2 MFC set to  0.000000
4/1/2011	8:46:12 AM	BCl3 MFC set to  0.000000
4/1/2011	8:46:12 AM	PHl3 MFC set to  0.000000
4/1/2011	8:46:12 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:46:12 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:46:12 AM	Tube furnace set to 0
4/1/2011	8:46:13 AM	Run finished at 8:46 AM
4/1/2011	8:46:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	8:54:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	8:55:03 AM	Recipe started at 8:54 AM
4/1/2011	8:55:03 AM	Helium valve closed
4/1/2011	8:55:03 AM	H2 valve closed
4/1/2011	8:55:03 AM	BCl3 valve closed
4/1/2011	8:55:03 AM	PH3 valve closed
4/1/2011	8:55:03 AM	SiCl4 pre valve closed
4/1/2011	8:55:03 AM	SiCl4 post valve closed
4/1/2011	8:55:03 AM	Main Vac valve closed
4/1/2011	8:55:03 AM	Bubbler valve closed
4/1/2011	8:55:03 AM	Bypass valve opened
4/1/2011	8:55:03 AM	Helium MFC set to  0.000000
4/1/2011	8:55:03 AM	H2 MFC set to  0.000000
4/1/2011	8:55:03 AM	BCl3 MFC set to  0.000000
4/1/2011	8:55:03 AM	PHl3 MFC set to  0.000000
4/1/2011	8:55:03 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:55:03 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:55:04 AM	Tube furnace set to 0
4/1/2011	8:55:36 AM	Helium valve closed
4/1/2011	8:55:36 AM	H2 valve closed
4/1/2011	8:55:36 AM	BCl3 valve closed
4/1/2011	8:55:36 AM	PH3 valve closed
4/1/2011	8:55:36 AM	SiCl4 pre valve closed
4/1/2011	8:55:36 AM	SiCl4 post valve closed
4/1/2011	8:55:36 AM	Bubbler valve closed
4/1/2011	8:55:36 AM	Main Vac valve opened
4/1/2011	8:55:36 AM	Bypass valve opened
4/1/2011	8:55:36 AM	Helium MFC set to  0.000000
4/1/2011	8:55:36 AM	H2 MFC set to  0.000000
4/1/2011	8:55:36 AM	BCl3 MFC set to  0.000000
4/1/2011	8:55:36 AM	PHl3 MFC set to  0.000000
4/1/2011	8:55:36 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:55:36 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:55:36 AM	Tube furnace set to 0
4/1/2011	8:56:36 AM	H2 valve closed
4/1/2011	8:56:36 AM	BCl3 valve closed
4/1/2011	8:56:36 AM	PH3 valve closed
4/1/2011	8:56:36 AM	SiCl4 pre valve closed
4/1/2011	8:56:36 AM	SiCl4 post valve closed
4/1/2011	8:56:36 AM	Bubbler valve closed
4/1/2011	8:56:36 AM	Helium valve opened
4/1/2011	8:56:36 AM	Main Vac valve opened
4/1/2011	8:56:36 AM	Bypass valve opened
4/1/2011	8:56:36 AM	Helium MFC set to  100.000000
4/1/2011	8:56:36 AM	H2 MFC set to  0.000000
4/1/2011	8:56:36 AM	BCl3 MFC set to  0.000000
4/1/2011	8:56:36 AM	PHl3 MFC set to  0.000000
4/1/2011	8:56:36 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:56:36 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:56:36 AM	Tube furnace set to 0
4/1/2011	8:57:36 AM	Helium valve closed
4/1/2011	8:57:36 AM	H2 valve closed
4/1/2011	8:57:36 AM	BCl3 valve closed
4/1/2011	8:57:36 AM	PH3 valve closed
4/1/2011	8:57:36 AM	SiCl4 pre valve closed
4/1/2011	8:57:36 AM	SiCl4 post valve closed
4/1/2011	8:57:36 AM	Bubbler valve closed
4/1/2011	8:57:36 AM	Main Vac valve opened
4/1/2011	8:57:36 AM	Bypass valve opened
4/1/2011	8:57:36 AM	Helium MFC set to  0.000000
4/1/2011	8:57:36 AM	H2 MFC set to  0.000000
4/1/2011	8:57:36 AM	BCl3 MFC set to  0.000000
4/1/2011	8:57:36 AM	PHl3 MFC set to  0.000000
4/1/2011	8:57:36 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:57:36 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:57:36 AM	Tube furnace set to 0
4/1/2011	8:58:36 AM	H2 valve closed
4/1/2011	8:58:36 AM	BCl3 valve closed
4/1/2011	8:58:36 AM	PH3 valve closed
4/1/2011	8:58:36 AM	SiCl4 pre valve closed
4/1/2011	8:58:36 AM	SiCl4 post valve closed
4/1/2011	8:58:36 AM	Bubbler valve closed
4/1/2011	8:58:36 AM	Helium valve opened
4/1/2011	8:58:36 AM	Main Vac valve opened
4/1/2011	8:58:36 AM	Bypass valve opened
4/1/2011	8:58:36 AM	Helium MFC set to  100.000000
4/1/2011	8:58:36 AM	H2 MFC set to  0.000000
4/1/2011	8:58:36 AM	BCl3 MFC set to  0.000000
4/1/2011	8:58:36 AM	PHl3 MFC set to  0.000000
4/1/2011	8:58:36 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:58:36 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:58:36 AM	Tube furnace set to 0
4/1/2011	8:59:36 AM	Helium valve closed
4/1/2011	8:59:36 AM	H2 valve closed
4/1/2011	8:59:36 AM	BCl3 valve closed
4/1/2011	8:59:36 AM	PH3 valve closed
4/1/2011	8:59:36 AM	SiCl4 pre valve closed
4/1/2011	8:59:36 AM	SiCl4 post valve closed
4/1/2011	8:59:36 AM	Bubbler valve closed
4/1/2011	8:59:36 AM	Main Vac valve opened
4/1/2011	8:59:36 AM	Bypass valve opened
4/1/2011	8:59:36 AM	Helium MFC set to  0.000000
4/1/2011	8:59:36 AM	H2 MFC set to  0.000000
4/1/2011	8:59:36 AM	BCl3 MFC set to  0.000000
4/1/2011	8:59:36 AM	PHl3 MFC set to  0.000000
4/1/2011	8:59:36 AM	SiCl4 MFC set to  0.000000
4/1/2011	8:59:36 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	8:59:37 AM	Tube furnace set to 0
4/1/2011	9:00:37 AM	H2 valve closed
4/1/2011	9:00:37 AM	BCl3 valve closed
4/1/2011	9:00:37 AM	PH3 valve closed
4/1/2011	9:00:37 AM	SiCl4 pre valve closed
4/1/2011	9:00:37 AM	SiCl4 post valve closed
4/1/2011	9:00:37 AM	Bubbler valve closed
4/1/2011	9:00:37 AM	Helium valve opened
4/1/2011	9:00:37 AM	Main Vac valve opened
4/1/2011	9:00:37 AM	Bypass valve opened
4/1/2011	9:00:37 AM	Helium MFC set to  100.000000
4/1/2011	9:00:37 AM	H2 MFC set to  0.000000
4/1/2011	9:00:37 AM	BCl3 MFC set to  0.000000
4/1/2011	9:00:37 AM	PHl3 MFC set to  0.000000
4/1/2011	9:00:37 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:00:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:00:37 AM	Tube furnace set to 0
4/1/2011	9:01:37 AM	Helium valve closed
4/1/2011	9:01:37 AM	H2 valve closed
4/1/2011	9:01:37 AM	BCl3 valve closed
4/1/2011	9:01:37 AM	PH3 valve closed
4/1/2011	9:01:37 AM	SiCl4 pre valve closed
4/1/2011	9:01:37 AM	SiCl4 post valve closed
4/1/2011	9:01:37 AM	Bubbler valve closed
4/1/2011	9:01:37 AM	Main Vac valve opened
4/1/2011	9:01:37 AM	Bypass valve opened
4/1/2011	9:01:37 AM	Helium MFC set to  0.000000
4/1/2011	9:01:37 AM	H2 MFC set to  0.000000
4/1/2011	9:01:37 AM	BCl3 MFC set to  0.000000
4/1/2011	9:01:37 AM	PHl3 MFC set to  0.000000
4/1/2011	9:01:37 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:01:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:01:37 AM	Tube furnace set to 0
4/1/2011	9:02:37 AM	H2 valve closed
4/1/2011	9:02:37 AM	BCl3 valve closed
4/1/2011	9:02:37 AM	PH3 valve closed
4/1/2011	9:02:37 AM	SiCl4 pre valve closed
4/1/2011	9:02:37 AM	SiCl4 post valve closed
4/1/2011	9:02:37 AM	Bubbler valve closed
4/1/2011	9:02:37 AM	Helium valve opened
4/1/2011	9:02:37 AM	Main Vac valve opened
4/1/2011	9:02:37 AM	Bypass valve opened
4/1/2011	9:02:37 AM	Helium MFC set to  100.000000
4/1/2011	9:02:37 AM	H2 MFC set to  0.000000
4/1/2011	9:02:37 AM	BCl3 MFC set to  0.000000
4/1/2011	9:02:37 AM	PHl3 MFC set to  0.000000
4/1/2011	9:02:37 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:02:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:02:37 AM	Tube furnace set to 0
4/1/2011	9:03:37 AM	Helium valve closed
4/1/2011	9:03:37 AM	H2 valve closed
4/1/2011	9:03:37 AM	BCl3 valve closed
4/1/2011	9:03:37 AM	PH3 valve closed
4/1/2011	9:03:37 AM	SiCl4 pre valve closed
4/1/2011	9:03:37 AM	SiCl4 post valve closed
4/1/2011	9:03:37 AM	Bubbler valve closed
4/1/2011	9:03:37 AM	Main Vac valve opened
4/1/2011	9:03:37 AM	Bypass valve opened
4/1/2011	9:03:37 AM	Helium MFC set to  0.000000
4/1/2011	9:03:37 AM	H2 MFC set to  0.000000
4/1/2011	9:03:37 AM	BCl3 MFC set to  0.000000
4/1/2011	9:03:37 AM	PHl3 MFC set to  0.000000
4/1/2011	9:03:37 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:03:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:03:37 AM	Tube furnace set to 0
4/1/2011	9:04:37 AM	H2 valve closed
4/1/2011	9:04:37 AM	BCl3 valve closed
4/1/2011	9:04:37 AM	PH3 valve closed
4/1/2011	9:04:37 AM	SiCl4 pre valve closed
4/1/2011	9:04:37 AM	SiCl4 post valve closed
4/1/2011	9:04:37 AM	Bubbler valve closed
4/1/2011	9:04:37 AM	Helium valve opened
4/1/2011	9:04:37 AM	Main Vac valve opened
4/1/2011	9:04:37 AM	Bypass valve opened
4/1/2011	9:04:37 AM	Helium MFC set to  100.000000
4/1/2011	9:04:37 AM	H2 MFC set to  0.000000
4/1/2011	9:04:37 AM	BCl3 MFC set to  0.000000
4/1/2011	9:04:37 AM	PHl3 MFC set to  0.000000
4/1/2011	9:04:37 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:04:37 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:04:38 AM	Tube furnace set to 0
4/1/2011	9:05:38 AM	Helium valve closed
4/1/2011	9:05:38 AM	H2 valve closed
4/1/2011	9:05:38 AM	BCl3 valve closed
4/1/2011	9:05:38 AM	PH3 valve closed
4/1/2011	9:05:38 AM	SiCl4 pre valve closed
4/1/2011	9:05:38 AM	SiCl4 post valve closed
4/1/2011	9:05:38 AM	Bubbler valve closed
4/1/2011	9:05:38 AM	Main Vac valve opened
4/1/2011	9:05:38 AM	Bypass valve opened
4/1/2011	9:05:38 AM	Helium MFC set to  0.000000
4/1/2011	9:05:38 AM	H2 MFC set to  0.000000
4/1/2011	9:05:38 AM	BCl3 MFC set to  0.000000
4/1/2011	9:05:38 AM	PHl3 MFC set to  0.000000
4/1/2011	9:05:38 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:05:38 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:05:38 AM	Tube furnace set to 0
4/1/2011	9:06:38 AM	H2 valve closed
4/1/2011	9:06:38 AM	BCl3 valve closed
4/1/2011	9:06:38 AM	PH3 valve closed
4/1/2011	9:06:38 AM	SiCl4 pre valve closed
4/1/2011	9:06:38 AM	SiCl4 post valve closed
4/1/2011	9:06:38 AM	Bubbler valve closed
4/1/2011	9:06:38 AM	Helium valve opened
4/1/2011	9:06:38 AM	Main Vac valve opened
4/1/2011	9:06:38 AM	Bypass valve opened
4/1/2011	9:06:38 AM	Helium MFC set to  100.000000
4/1/2011	9:06:38 AM	H2 MFC set to  0.000000
4/1/2011	9:06:38 AM	BCl3 MFC set to  0.000000
4/1/2011	9:06:38 AM	PHl3 MFC set to  0.000000
4/1/2011	9:06:38 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:06:38 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:06:38 AM	Tube furnace set to 0
4/1/2011	9:07:38 AM	Helium valve closed
4/1/2011	9:07:38 AM	H2 valve closed
4/1/2011	9:07:38 AM	BCl3 valve closed
4/1/2011	9:07:38 AM	PH3 valve closed
4/1/2011	9:07:38 AM	SiCl4 pre valve closed
4/1/2011	9:07:38 AM	SiCl4 post valve closed
4/1/2011	9:07:38 AM	Bubbler valve closed
4/1/2011	9:07:38 AM	Main Vac valve opened
4/1/2011	9:07:38 AM	Bypass valve opened
4/1/2011	9:07:38 AM	Helium MFC set to  0.000000
4/1/2011	9:07:38 AM	H2 MFC set to  0.000000
4/1/2011	9:07:38 AM	BCl3 MFC set to  0.000000
4/1/2011	9:07:38 AM	PHl3 MFC set to  0.000000
4/1/2011	9:07:38 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:07:38 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:07:38 AM	Tube furnace set to 0
4/1/2011	9:08:38 AM	H2 valve closed
4/1/2011	9:08:38 AM	BCl3 valve closed
4/1/2011	9:08:38 AM	PH3 valve closed
4/1/2011	9:08:38 AM	SiCl4 pre valve closed
4/1/2011	9:08:38 AM	SiCl4 post valve closed
4/1/2011	9:08:38 AM	Bubbler valve closed
4/1/2011	9:08:38 AM	Helium valve opened
4/1/2011	9:08:38 AM	Main Vac valve opened
4/1/2011	9:08:38 AM	Bypass valve opened
4/1/2011	9:08:38 AM	Helium MFC set to  100.000000
4/1/2011	9:08:38 AM	H2 MFC set to  0.000000
4/1/2011	9:08:38 AM	BCl3 MFC set to  0.000000
4/1/2011	9:08:38 AM	PHl3 MFC set to  0.000000
4/1/2011	9:08:38 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:08:38 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:08:38 AM	Tube furnace set to 0
4/1/2011	9:09:38 AM	Helium valve closed
4/1/2011	9:09:38 AM	H2 valve closed
4/1/2011	9:09:38 AM	BCl3 valve closed
4/1/2011	9:09:38 AM	PH3 valve closed
4/1/2011	9:09:38 AM	SiCl4 pre valve closed
4/1/2011	9:09:38 AM	SiCl4 post valve closed
4/1/2011	9:09:38 AM	Bubbler valve closed
4/1/2011	9:09:38 AM	Main Vac valve opened
4/1/2011	9:09:38 AM	Bypass valve opened
4/1/2011	9:09:38 AM	Helium MFC set to  0.000000
4/1/2011	9:09:38 AM	H2 MFC set to  0.000000
4/1/2011	9:09:38 AM	BCl3 MFC set to  0.000000
4/1/2011	9:09:38 AM	PHl3 MFC set to  0.000000
4/1/2011	9:09:38 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:09:38 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:09:39 AM	Tube furnace set to 0
4/1/2011	9:10:39 AM	H2 valve closed
4/1/2011	9:10:39 AM	BCl3 valve closed
4/1/2011	9:10:39 AM	PH3 valve closed
4/1/2011	9:10:39 AM	SiCl4 pre valve closed
4/1/2011	9:10:39 AM	SiCl4 post valve closed
4/1/2011	9:10:39 AM	Bubbler valve closed
4/1/2011	9:10:39 AM	Helium valve opened
4/1/2011	9:10:39 AM	Main Vac valve opened
4/1/2011	9:10:39 AM	Bypass valve opened
4/1/2011	9:10:39 AM	Helium MFC set to  100.000000
4/1/2011	9:10:39 AM	H2 MFC set to  0.000000
4/1/2011	9:10:39 AM	BCl3 MFC set to  0.000000
4/1/2011	9:10:39 AM	PHl3 MFC set to  0.000000
4/1/2011	9:10:39 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:10:39 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:10:39 AM	Tube furnace set to 0
4/1/2011	9:11:39 AM	Helium valve closed
4/1/2011	9:11:39 AM	H2 valve closed
4/1/2011	9:11:39 AM	BCl3 valve closed
4/1/2011	9:11:39 AM	PH3 valve closed
4/1/2011	9:11:39 AM	SiCl4 pre valve closed
4/1/2011	9:11:39 AM	SiCl4 post valve closed
4/1/2011	9:11:39 AM	Bubbler valve closed
4/1/2011	9:11:39 AM	Main Vac valve opened
4/1/2011	9:11:39 AM	Bypass valve opened
4/1/2011	9:11:39 AM	Helium MFC set to  0.000000
4/1/2011	9:11:39 AM	H2 MFC set to  0.000000
4/1/2011	9:11:39 AM	BCl3 MFC set to  0.000000
4/1/2011	9:11:39 AM	PHl3 MFC set to  0.000000
4/1/2011	9:11:39 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:11:39 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:11:39 AM	Tube furnace set to 0
4/1/2011	9:12:39 AM	H2 valve closed
4/1/2011	9:12:39 AM	BCl3 valve closed
4/1/2011	9:12:39 AM	PH3 valve closed
4/1/2011	9:12:39 AM	SiCl4 pre valve closed
4/1/2011	9:12:39 AM	SiCl4 post valve closed
4/1/2011	9:12:39 AM	Bubbler valve closed
4/1/2011	9:12:39 AM	Helium valve opened
4/1/2011	9:12:39 AM	Main Vac valve opened
4/1/2011	9:12:39 AM	Bypass valve opened
4/1/2011	9:12:39 AM	Helium MFC set to  100.000000
4/1/2011	9:12:39 AM	H2 MFC set to  0.000000
4/1/2011	9:12:39 AM	BCl3 MFC set to  0.000000
4/1/2011	9:12:39 AM	PHl3 MFC set to  0.000000
4/1/2011	9:12:39 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:12:39 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:12:39 AM	Tube furnace set to 0
4/1/2011	9:13:39 AM	Helium valve closed
4/1/2011	9:13:39 AM	H2 valve closed
4/1/2011	9:13:39 AM	BCl3 valve closed
4/1/2011	9:13:39 AM	PH3 valve closed
4/1/2011	9:13:39 AM	SiCl4 pre valve closed
4/1/2011	9:13:39 AM	SiCl4 post valve closed
4/1/2011	9:13:39 AM	Bubbler valve closed
4/1/2011	9:13:39 AM	Main Vac valve opened
4/1/2011	9:13:39 AM	Bypass valve opened
4/1/2011	9:13:39 AM	Helium MFC set to  0.000000
4/1/2011	9:13:39 AM	H2 MFC set to  0.000000
4/1/2011	9:13:39 AM	BCl3 MFC set to  0.000000
4/1/2011	9:13:39 AM	PHl3 MFC set to  0.000000
4/1/2011	9:13:39 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:13:39 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:13:39 AM	Tube furnace set to 0
4/1/2011	9:14:39 AM	H2 valve closed
4/1/2011	9:14:39 AM	BCl3 valve closed
4/1/2011	9:14:39 AM	PH3 valve closed
4/1/2011	9:14:39 AM	SiCl4 pre valve closed
4/1/2011	9:14:39 AM	SiCl4 post valve closed
4/1/2011	9:14:39 AM	Bubbler valve closed
4/1/2011	9:14:39 AM	Helium valve opened
4/1/2011	9:14:39 AM	Main Vac valve opened
4/1/2011	9:14:39 AM	Bypass valve opened
4/1/2011	9:14:39 AM	Helium MFC set to  100.000000
4/1/2011	9:14:39 AM	H2 MFC set to  0.000000
4/1/2011	9:14:39 AM	BCl3 MFC set to  0.000000
4/1/2011	9:14:39 AM	PHl3 MFC set to  0.000000
4/1/2011	9:14:39 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:14:39 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:14:40 AM	Tube furnace set to 0
4/1/2011	9:15:40 AM	Helium valve closed
4/1/2011	9:15:40 AM	H2 valve closed
4/1/2011	9:15:40 AM	BCl3 valve closed
4/1/2011	9:15:40 AM	PH3 valve closed
4/1/2011	9:15:40 AM	SiCl4 pre valve closed
4/1/2011	9:15:40 AM	SiCl4 post valve closed
4/1/2011	9:15:40 AM	Bubbler valve closed
4/1/2011	9:15:40 AM	Main Vac valve opened
4/1/2011	9:15:40 AM	Bypass valve opened
4/1/2011	9:15:40 AM	Helium MFC set to  0.000000
4/1/2011	9:15:40 AM	H2 MFC set to  0.000000
4/1/2011	9:15:40 AM	BCl3 MFC set to  0.000000
4/1/2011	9:15:40 AM	PHl3 MFC set to  0.000000
4/1/2011	9:15:40 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:15:40 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:15:40 AM	Tube furnace set to 0
4/1/2011	9:15:41 AM	Run finished at 9:15 AM
4/1/2011	9:15:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	9:41:30 AM	Recipe started at 9:41 AM
4/1/2011	9:41:30 AM	Helium valve closed
4/1/2011	9:41:30 AM	BCl3 valve closed
4/1/2011	9:41:30 AM	PH3 valve closed
4/1/2011	9:41:30 AM	SiCl4 pre valve closed
4/1/2011	9:41:30 AM	SiCl4 post valve closed
4/1/2011	9:41:30 AM	Main Vac valve closed
4/1/2011	9:41:30 AM	Bypass valve closed
4/1/2011	9:41:30 AM	Bubbler valve closed
4/1/2011	9:41:30 AM	H2 valve opened
4/1/2011	9:41:30 AM	Helium MFC set to  0.000000
4/1/2011	9:41:30 AM	H2 MFC set to  500.000000
4/1/2011	9:41:30 AM	BCl3 MFC set to  0.000000
4/1/2011	9:41:30 AM	PHl3 MFC set to  0.000000
4/1/2011	9:41:30 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:41:30 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:41:30 AM	Tube furnace set to 0
4/1/2011	9:42:53 AM	Helium valve closed
4/1/2011	9:42:53 AM	BCl3 valve closed
4/1/2011	9:42:53 AM	PH3 valve closed
4/1/2011	9:42:53 AM	SiCl4 pre valve closed
4/1/2011	9:42:53 AM	SiCl4 post valve closed
4/1/2011	9:42:53 AM	Main Vac valve closed
4/1/2011	9:42:53 AM	Bypass valve closed
4/1/2011	9:42:53 AM	H2 valve opened
4/1/2011	9:42:53 AM	Bubbler valve opened
4/1/2011	9:42:53 AM	Helium MFC set to  0.000000
4/1/2011	9:42:53 AM	H2 MFC set to  500.000000
4/1/2011	9:42:53 AM	BCl3 MFC set to  0.000000
4/1/2011	9:42:53 AM	PHl3 MFC set to  0.000000
4/1/2011	9:42:53 AM	SiCl4 MFC set to  0.000000
4/1/2011	9:42:53 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	9:42:53 AM	Tube furnace set to 1000
4/1/2011	10:02:53 AM	Helium valve closed
4/1/2011	10:02:53 AM	PH3 valve closed
4/1/2011	10:02:53 AM	Main Vac valve closed
4/1/2011	10:02:53 AM	Bypass valve closed
4/1/2011	10:02:53 AM	H2 valve opened
4/1/2011	10:02:53 AM	BCl3 valve opened
4/1/2011	10:02:53 AM	SiCl4 pre valve opened
4/1/2011	10:02:53 AM	SiCl4 post valve opened
4/1/2011	10:02:53 AM	Bubbler valve opened
4/1/2011	10:02:53 AM	Helium MFC set to  0.000000
4/1/2011	10:02:53 AM	H2 MFC set to  500.000000
4/1/2011	10:02:53 AM	BCl3 MFC set to  3.000000
4/1/2011	10:02:53 AM	PHl3 MFC set to  0.000000
4/1/2011	10:02:53 AM	SiCl4 MFC set to  50.000000
4/1/2011	10:02:53 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	10:02:54 AM	Tube furnace set to 1000
4/1/2011	10:22:53 AM	H2 valve closed
4/1/2011	10:22:53 AM	BCl3 valve closed
4/1/2011	10:22:53 AM	PH3 valve closed
4/1/2011	10:22:54 AM	SiCl4 pre valve closed
4/1/2011	10:22:54 AM	SiCl4 post valve closed
4/1/2011	10:22:54 AM	Main Vac valve closed
4/1/2011	10:22:54 AM	Bypass valve closed
4/1/2011	10:22:54 AM	Helium valve opened
4/1/2011	10:22:54 AM	Bubbler valve opened
4/1/2011	10:22:54 AM	Helium MFC set to  500.000000
4/1/2011	10:22:54 AM	H2 MFC set to  0.000000
4/1/2011	10:22:54 AM	BCl3 MFC set to  0.000000
4/1/2011	10:22:54 AM	PHl3 MFC set to  0.000000
4/1/2011	10:22:54 AM	SiCl4 MFC set to  0.000000
4/1/2011	10:22:54 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	10:22:54 AM	Tube furnace set to 0
4/1/2011	10:42:54 AM	Helium valve closed
4/1/2011	10:42:54 AM	H2 valve closed
4/1/2011	10:42:54 AM	BCl3 valve closed
4/1/2011	10:42:54 AM	PH3 valve closed
4/1/2011	10:42:54 AM	SiCl4 pre valve closed
4/1/2011	10:42:54 AM	SiCl4 post valve closed
4/1/2011	10:42:54 AM	Main Vac valve closed
4/1/2011	10:42:54 AM	Bypass valve closed
4/1/2011	10:42:54 AM	Bubbler valve closed
4/1/2011	10:42:54 AM	Helium MFC set to  0.000000
4/1/2011	10:42:54 AM	H2 MFC set to  0.000000
4/1/2011	10:42:54 AM	BCl3 MFC set to  0.000000
4/1/2011	10:42:54 AM	PHl3 MFC set to  0.000000
4/1/2011	10:42:54 AM	SiCl4 MFC set to  0.000000
4/1/2011	10:42:54 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	10:42:54 AM	Tube furnace set to 0
4/1/2011	10:42:54 AM	Run finished at 10:42 AM
4/1/2011	11:09:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	11:09:53 AM	Recipe started at 11:09 AM
4/1/2011	11:09:53 AM	Helium valve closed
4/1/2011	11:09:53 AM	H2 valve closed
4/1/2011	11:09:53 AM	BCl3 valve closed
4/1/2011	11:09:53 AM	PH3 valve closed
4/1/2011	11:09:53 AM	SiCl4 pre valve closed
4/1/2011	11:09:53 AM	SiCl4 post valve closed
4/1/2011	11:09:53 AM	Main Vac valve closed
4/1/2011	11:09:53 AM	Bubbler valve closed
4/1/2011	11:09:53 AM	Bypass valve opened
4/1/2011	11:09:53 AM	Helium MFC set to  0.000000
4/1/2011	11:09:53 AM	H2 MFC set to  0.000000
4/1/2011	11:09:53 AM	BCl3 MFC set to  0.000000
4/1/2011	11:09:53 AM	PHl3 MFC set to  0.000000
4/1/2011	11:09:53 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:09:53 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:09:53 AM	Tube furnace set to 0
4/1/2011	11:10:26 AM	Helium valve closed
4/1/2011	11:10:26 AM	H2 valve closed
4/1/2011	11:10:26 AM	BCl3 valve closed
4/1/2011	11:10:26 AM	PH3 valve closed
4/1/2011	11:10:26 AM	SiCl4 pre valve closed
4/1/2011	11:10:26 AM	SiCl4 post valve closed
4/1/2011	11:10:26 AM	Bubbler valve closed
4/1/2011	11:10:26 AM	Main Vac valve opened
4/1/2011	11:10:26 AM	Bypass valve opened
4/1/2011	11:10:26 AM	Helium MFC set to  0.000000
4/1/2011	11:10:26 AM	H2 MFC set to  0.000000
4/1/2011	11:10:26 AM	BCl3 MFC set to  0.000000
4/1/2011	11:10:26 AM	PHl3 MFC set to  0.000000
4/1/2011	11:10:26 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:10:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:10:26 AM	Tube furnace set to 0
4/1/2011	11:11:26 AM	H2 valve closed
4/1/2011	11:11:26 AM	BCl3 valve closed
4/1/2011	11:11:26 AM	PH3 valve closed
4/1/2011	11:11:26 AM	SiCl4 pre valve closed
4/1/2011	11:11:26 AM	SiCl4 post valve closed
4/1/2011	11:11:26 AM	Bubbler valve closed
4/1/2011	11:11:26 AM	Helium valve opened
4/1/2011	11:11:26 AM	Main Vac valve opened
4/1/2011	11:11:26 AM	Bypass valve opened
4/1/2011	11:11:26 AM	Helium MFC set to  100.000000
4/1/2011	11:11:26 AM	H2 MFC set to  0.000000
4/1/2011	11:11:26 AM	BCl3 MFC set to  0.000000
4/1/2011	11:11:26 AM	PHl3 MFC set to  0.000000
4/1/2011	11:11:26 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:11:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:11:26 AM	Tube furnace set to 0
4/1/2011	11:12:26 AM	Helium valve closed
4/1/2011	11:12:26 AM	H2 valve closed
4/1/2011	11:12:26 AM	BCl3 valve closed
4/1/2011	11:12:26 AM	PH3 valve closed
4/1/2011	11:12:26 AM	SiCl4 pre valve closed
4/1/2011	11:12:26 AM	SiCl4 post valve closed
4/1/2011	11:12:26 AM	Bubbler valve closed
4/1/2011	11:12:26 AM	Main Vac valve opened
4/1/2011	11:12:26 AM	Bypass valve opened
4/1/2011	11:12:26 AM	Helium MFC set to  0.000000
4/1/2011	11:12:26 AM	H2 MFC set to  0.000000
4/1/2011	11:12:26 AM	BCl3 MFC set to  0.000000
4/1/2011	11:12:26 AM	PHl3 MFC set to  0.000000
4/1/2011	11:12:26 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:12:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:12:26 AM	Tube furnace set to 0
4/1/2011	11:13:26 AM	H2 valve closed
4/1/2011	11:13:26 AM	BCl3 valve closed
4/1/2011	11:13:26 AM	PH3 valve closed
4/1/2011	11:13:26 AM	SiCl4 pre valve closed
4/1/2011	11:13:26 AM	SiCl4 post valve closed
4/1/2011	11:13:26 AM	Bubbler valve closed
4/1/2011	11:13:26 AM	Helium valve opened
4/1/2011	11:13:26 AM	Main Vac valve opened
4/1/2011	11:13:26 AM	Bypass valve opened
4/1/2011	11:13:26 AM	Helium MFC set to  100.000000
4/1/2011	11:13:26 AM	H2 MFC set to  0.000000
4/1/2011	11:13:26 AM	BCl3 MFC set to  0.000000
4/1/2011	11:13:26 AM	PHl3 MFC set to  0.000000
4/1/2011	11:13:26 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:13:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:13:26 AM	Tube furnace set to 0
4/1/2011	11:14:26 AM	Helium valve closed
4/1/2011	11:14:26 AM	H2 valve closed
4/1/2011	11:14:26 AM	BCl3 valve closed
4/1/2011	11:14:26 AM	PH3 valve closed
4/1/2011	11:14:26 AM	SiCl4 pre valve closed
4/1/2011	11:14:26 AM	SiCl4 post valve closed
4/1/2011	11:14:26 AM	Bubbler valve closed
4/1/2011	11:14:26 AM	Main Vac valve opened
4/1/2011	11:14:26 AM	Bypass valve opened
4/1/2011	11:14:26 AM	Helium MFC set to  0.000000
4/1/2011	11:14:26 AM	H2 MFC set to  0.000000
4/1/2011	11:14:26 AM	BCl3 MFC set to  0.000000
4/1/2011	11:14:26 AM	PHl3 MFC set to  0.000000
4/1/2011	11:14:26 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:14:26 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:14:27 AM	Tube furnace set to 0
4/1/2011	11:15:27 AM	H2 valve closed
4/1/2011	11:15:27 AM	BCl3 valve closed
4/1/2011	11:15:27 AM	PH3 valve closed
4/1/2011	11:15:27 AM	SiCl4 pre valve closed
4/1/2011	11:15:27 AM	SiCl4 post valve closed
4/1/2011	11:15:27 AM	Bubbler valve closed
4/1/2011	11:15:27 AM	Helium valve opened
4/1/2011	11:15:27 AM	Main Vac valve opened
4/1/2011	11:15:27 AM	Bypass valve opened
4/1/2011	11:15:27 AM	Helium MFC set to  100.000000
4/1/2011	11:15:27 AM	H2 MFC set to  0.000000
4/1/2011	11:15:27 AM	BCl3 MFC set to  0.000000
4/1/2011	11:15:27 AM	PHl3 MFC set to  0.000000
4/1/2011	11:15:27 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:15:27 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:15:27 AM	Tube furnace set to 0
4/1/2011	11:16:27 AM	Helium valve closed
4/1/2011	11:16:27 AM	H2 valve closed
4/1/2011	11:16:27 AM	BCl3 valve closed
4/1/2011	11:16:27 AM	PH3 valve closed
4/1/2011	11:16:27 AM	SiCl4 pre valve closed
4/1/2011	11:16:27 AM	SiCl4 post valve closed
4/1/2011	11:16:27 AM	Bubbler valve closed
4/1/2011	11:16:27 AM	Main Vac valve opened
4/1/2011	11:16:27 AM	Bypass valve opened
4/1/2011	11:16:27 AM	Helium MFC set to  0.000000
4/1/2011	11:16:27 AM	H2 MFC set to  0.000000
4/1/2011	11:16:27 AM	BCl3 MFC set to  0.000000
4/1/2011	11:16:27 AM	PHl3 MFC set to  0.000000
4/1/2011	11:16:27 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:16:27 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:16:27 AM	Tube furnace set to 0
4/1/2011	11:17:27 AM	H2 valve closed
4/1/2011	11:17:27 AM	BCl3 valve closed
4/1/2011	11:17:27 AM	PH3 valve closed
4/1/2011	11:17:27 AM	SiCl4 pre valve closed
4/1/2011	11:17:27 AM	SiCl4 post valve closed
4/1/2011	11:17:27 AM	Bubbler valve closed
4/1/2011	11:17:27 AM	Helium valve opened
4/1/2011	11:17:27 AM	Main Vac valve opened
4/1/2011	11:17:27 AM	Bypass valve opened
4/1/2011	11:17:27 AM	Helium MFC set to  100.000000
4/1/2011	11:17:27 AM	H2 MFC set to  0.000000
4/1/2011	11:17:27 AM	BCl3 MFC set to  0.000000
4/1/2011	11:17:27 AM	PHl3 MFC set to  0.000000
4/1/2011	11:17:27 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:17:27 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:17:27 AM	Tube furnace set to 0
4/1/2011	11:18:27 AM	Helium valve closed
4/1/2011	11:18:27 AM	H2 valve closed
4/1/2011	11:18:27 AM	BCl3 valve closed
4/1/2011	11:18:27 AM	PH3 valve closed
4/1/2011	11:18:27 AM	SiCl4 pre valve closed
4/1/2011	11:18:27 AM	SiCl4 post valve closed
4/1/2011	11:18:27 AM	Bubbler valve closed
4/1/2011	11:18:27 AM	Main Vac valve opened
4/1/2011	11:18:27 AM	Bypass valve opened
4/1/2011	11:18:27 AM	Helium MFC set to  0.000000
4/1/2011	11:18:27 AM	H2 MFC set to  0.000000
4/1/2011	11:18:27 AM	BCl3 MFC set to  0.000000
4/1/2011	11:18:27 AM	PHl3 MFC set to  0.000000
4/1/2011	11:18:27 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:18:27 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:18:27 AM	Tube furnace set to 0
4/1/2011	11:19:27 AM	H2 valve closed
4/1/2011	11:19:27 AM	BCl3 valve closed
4/1/2011	11:19:27 AM	PH3 valve closed
4/1/2011	11:19:27 AM	SiCl4 pre valve closed
4/1/2011	11:19:27 AM	SiCl4 post valve closed
4/1/2011	11:19:27 AM	Bubbler valve closed
4/1/2011	11:19:27 AM	Helium valve opened
4/1/2011	11:19:27 AM	Main Vac valve opened
4/1/2011	11:19:27 AM	Bypass valve opened
4/1/2011	11:19:27 AM	Helium MFC set to  100.000000
4/1/2011	11:19:27 AM	H2 MFC set to  0.000000
4/1/2011	11:19:27 AM	BCl3 MFC set to  0.000000
4/1/2011	11:19:27 AM	PHl3 MFC set to  0.000000
4/1/2011	11:19:27 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:19:27 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:19:28 AM	Tube furnace set to 0
4/1/2011	11:20:28 AM	Helium valve closed
4/1/2011	11:20:28 AM	H2 valve closed
4/1/2011	11:20:28 AM	BCl3 valve closed
4/1/2011	11:20:28 AM	PH3 valve closed
4/1/2011	11:20:28 AM	SiCl4 pre valve closed
4/1/2011	11:20:28 AM	SiCl4 post valve closed
4/1/2011	11:20:28 AM	Bubbler valve closed
4/1/2011	11:20:28 AM	Main Vac valve opened
4/1/2011	11:20:28 AM	Bypass valve opened
4/1/2011	11:20:28 AM	Helium MFC set to  0.000000
4/1/2011	11:20:28 AM	H2 MFC set to  0.000000
4/1/2011	11:20:28 AM	BCl3 MFC set to  0.000000
4/1/2011	11:20:28 AM	PHl3 MFC set to  0.000000
4/1/2011	11:20:28 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:20:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:20:28 AM	Tube furnace set to 0
4/1/2011	11:21:28 AM	H2 valve closed
4/1/2011	11:21:28 AM	BCl3 valve closed
4/1/2011	11:21:28 AM	PH3 valve closed
4/1/2011	11:21:28 AM	SiCl4 pre valve closed
4/1/2011	11:21:28 AM	SiCl4 post valve closed
4/1/2011	11:21:28 AM	Bubbler valve closed
4/1/2011	11:21:28 AM	Helium valve opened
4/1/2011	11:21:28 AM	Main Vac valve opened
4/1/2011	11:21:28 AM	Bypass valve opened
4/1/2011	11:21:28 AM	Helium MFC set to  100.000000
4/1/2011	11:21:28 AM	H2 MFC set to  0.000000
4/1/2011	11:21:28 AM	BCl3 MFC set to  0.000000
4/1/2011	11:21:28 AM	PHl3 MFC set to  0.000000
4/1/2011	11:21:28 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:21:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:21:28 AM	Tube furnace set to 0
4/1/2011	11:22:28 AM	Helium valve closed
4/1/2011	11:22:28 AM	H2 valve closed
4/1/2011	11:22:28 AM	BCl3 valve closed
4/1/2011	11:22:28 AM	PH3 valve closed
4/1/2011	11:22:28 AM	SiCl4 pre valve closed
4/1/2011	11:22:28 AM	SiCl4 post valve closed
4/1/2011	11:22:28 AM	Bubbler valve closed
4/1/2011	11:22:28 AM	Main Vac valve opened
4/1/2011	11:22:28 AM	Bypass valve opened
4/1/2011	11:22:28 AM	Helium MFC set to  0.000000
4/1/2011	11:22:28 AM	H2 MFC set to  0.000000
4/1/2011	11:22:28 AM	BCl3 MFC set to  0.000000
4/1/2011	11:22:28 AM	PHl3 MFC set to  0.000000
4/1/2011	11:22:28 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:22:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:22:28 AM	Tube furnace set to 0
4/1/2011	11:23:28 AM	H2 valve closed
4/1/2011	11:23:28 AM	BCl3 valve closed
4/1/2011	11:23:28 AM	PH3 valve closed
4/1/2011	11:23:28 AM	SiCl4 pre valve closed
4/1/2011	11:23:28 AM	SiCl4 post valve closed
4/1/2011	11:23:28 AM	Bubbler valve closed
4/1/2011	11:23:28 AM	Helium valve opened
4/1/2011	11:23:28 AM	Main Vac valve opened
4/1/2011	11:23:28 AM	Bypass valve opened
4/1/2011	11:23:28 AM	Helium MFC set to  100.000000
4/1/2011	11:23:28 AM	H2 MFC set to  0.000000
4/1/2011	11:23:28 AM	BCl3 MFC set to  0.000000
4/1/2011	11:23:28 AM	PHl3 MFC set to  0.000000
4/1/2011	11:23:28 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:23:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:23:28 AM	Tube furnace set to 0
4/1/2011	11:24:28 AM	Helium valve closed
4/1/2011	11:24:28 AM	H2 valve closed
4/1/2011	11:24:28 AM	BCl3 valve closed
4/1/2011	11:24:28 AM	PH3 valve closed
4/1/2011	11:24:28 AM	SiCl4 pre valve closed
4/1/2011	11:24:28 AM	SiCl4 post valve closed
4/1/2011	11:24:28 AM	Bubbler valve closed
4/1/2011	11:24:28 AM	Main Vac valve opened
4/1/2011	11:24:28 AM	Bypass valve opened
4/1/2011	11:24:28 AM	Helium MFC set to  0.000000
4/1/2011	11:24:28 AM	H2 MFC set to  0.000000
4/1/2011	11:24:28 AM	BCl3 MFC set to  0.000000
4/1/2011	11:24:28 AM	PHl3 MFC set to  0.000000
4/1/2011	11:24:28 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:24:28 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:24:29 AM	Tube furnace set to 0
4/1/2011	11:25:29 AM	H2 valve closed
4/1/2011	11:25:29 AM	BCl3 valve closed
4/1/2011	11:25:29 AM	PH3 valve closed
4/1/2011	11:25:29 AM	SiCl4 pre valve closed
4/1/2011	11:25:29 AM	SiCl4 post valve closed
4/1/2011	11:25:29 AM	Bubbler valve closed
4/1/2011	11:25:29 AM	Helium valve opened
4/1/2011	11:25:29 AM	Main Vac valve opened
4/1/2011	11:25:29 AM	Bypass valve opened
4/1/2011	11:25:29 AM	Helium MFC set to  100.000000
4/1/2011	11:25:29 AM	H2 MFC set to  0.000000
4/1/2011	11:25:29 AM	BCl3 MFC set to  0.000000
4/1/2011	11:25:29 AM	PHl3 MFC set to  0.000000
4/1/2011	11:25:29 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:25:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:25:29 AM	Tube furnace set to 0
4/1/2011	11:26:29 AM	Helium valve closed
4/1/2011	11:26:29 AM	H2 valve closed
4/1/2011	11:26:29 AM	BCl3 valve closed
4/1/2011	11:26:29 AM	PH3 valve closed
4/1/2011	11:26:29 AM	SiCl4 pre valve closed
4/1/2011	11:26:29 AM	SiCl4 post valve closed
4/1/2011	11:26:29 AM	Bubbler valve closed
4/1/2011	11:26:29 AM	Main Vac valve opened
4/1/2011	11:26:29 AM	Bypass valve opened
4/1/2011	11:26:29 AM	Helium MFC set to  0.000000
4/1/2011	11:26:29 AM	H2 MFC set to  0.000000
4/1/2011	11:26:29 AM	BCl3 MFC set to  0.000000
4/1/2011	11:26:29 AM	PHl3 MFC set to  0.000000
4/1/2011	11:26:29 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:26:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:26:29 AM	Tube furnace set to 0
4/1/2011	11:27:29 AM	H2 valve closed
4/1/2011	11:27:29 AM	BCl3 valve closed
4/1/2011	11:27:29 AM	PH3 valve closed
4/1/2011	11:27:29 AM	SiCl4 pre valve closed
4/1/2011	11:27:29 AM	SiCl4 post valve closed
4/1/2011	11:27:29 AM	Bubbler valve closed
4/1/2011	11:27:29 AM	Helium valve opened
4/1/2011	11:27:29 AM	Main Vac valve opened
4/1/2011	11:27:29 AM	Bypass valve opened
4/1/2011	11:27:29 AM	Helium MFC set to  100.000000
4/1/2011	11:27:29 AM	H2 MFC set to  0.000000
4/1/2011	11:27:29 AM	BCl3 MFC set to  0.000000
4/1/2011	11:27:29 AM	PHl3 MFC set to  0.000000
4/1/2011	11:27:29 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:27:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:27:29 AM	Tube furnace set to 0
4/1/2011	11:28:29 AM	Helium valve closed
4/1/2011	11:28:29 AM	H2 valve closed
4/1/2011	11:28:29 AM	BCl3 valve closed
4/1/2011	11:28:29 AM	PH3 valve closed
4/1/2011	11:28:29 AM	SiCl4 pre valve closed
4/1/2011	11:28:29 AM	SiCl4 post valve closed
4/1/2011	11:28:29 AM	Bubbler valve closed
4/1/2011	11:28:29 AM	Main Vac valve opened
4/1/2011	11:28:29 AM	Bypass valve opened
4/1/2011	11:28:29 AM	Helium MFC set to  0.000000
4/1/2011	11:28:29 AM	H2 MFC set to  0.000000
4/1/2011	11:28:29 AM	BCl3 MFC set to  0.000000
4/1/2011	11:28:29 AM	PHl3 MFC set to  0.000000
4/1/2011	11:28:29 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:28:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:28:29 AM	Tube furnace set to 0
4/1/2011	11:29:29 AM	H2 valve closed
4/1/2011	11:29:29 AM	BCl3 valve closed
4/1/2011	11:29:29 AM	PH3 valve closed
4/1/2011	11:29:29 AM	SiCl4 pre valve closed
4/1/2011	11:29:29 AM	SiCl4 post valve closed
4/1/2011	11:29:29 AM	Bubbler valve closed
4/1/2011	11:29:29 AM	Helium valve opened
4/1/2011	11:29:29 AM	Main Vac valve opened
4/1/2011	11:29:29 AM	Bypass valve opened
4/1/2011	11:29:29 AM	Helium MFC set to  100.000000
4/1/2011	11:29:29 AM	H2 MFC set to  0.000000
4/1/2011	11:29:29 AM	BCl3 MFC set to  0.000000
4/1/2011	11:29:29 AM	PHl3 MFC set to  0.000000
4/1/2011	11:29:29 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:29:29 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:29:30 AM	Tube furnace set to 0
4/1/2011	11:30:30 AM	Helium valve closed
4/1/2011	11:30:30 AM	H2 valve closed
4/1/2011	11:30:30 AM	BCl3 valve closed
4/1/2011	11:30:30 AM	PH3 valve closed
4/1/2011	11:30:30 AM	SiCl4 pre valve closed
4/1/2011	11:30:30 AM	SiCl4 post valve closed
4/1/2011	11:30:30 AM	Bubbler valve closed
4/1/2011	11:30:30 AM	Main Vac valve opened
4/1/2011	11:30:30 AM	Bypass valve opened
4/1/2011	11:30:30 AM	Helium MFC set to  0.000000
4/1/2011	11:30:30 AM	H2 MFC set to  0.000000
4/1/2011	11:30:30 AM	BCl3 MFC set to  0.000000
4/1/2011	11:30:30 AM	PHl3 MFC set to  0.000000
4/1/2011	11:30:30 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:30:30 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:30:30 AM	Tube furnace set to 0
4/1/2011	11:30:31 AM	Run finished at 11:30 AM
4/1/2011	11:30:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	11:37:57 AM	Recipe started at 11:37 AM
4/1/2011	11:37:57 AM	Helium valve closed
4/1/2011	11:37:57 AM	BCl3 valve closed
4/1/2011	11:37:57 AM	PH3 valve closed
4/1/2011	11:37:57 AM	SiCl4 pre valve closed
4/1/2011	11:37:57 AM	SiCl4 post valve closed
4/1/2011	11:37:57 AM	Main Vac valve closed
4/1/2011	11:37:57 AM	Bypass valve closed
4/1/2011	11:37:57 AM	Bubbler valve closed
4/1/2011	11:37:57 AM	H2 valve opened
4/1/2011	11:37:57 AM	Helium MFC set to  0.000000
4/1/2011	11:37:57 AM	H2 MFC set to  500.000000
4/1/2011	11:37:57 AM	BCl3 MFC set to  0.000000
4/1/2011	11:37:57 AM	PHl3 MFC set to  0.000000
4/1/2011	11:37:57 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:37:57 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:37:57 AM	Tube furnace set to 0
4/1/2011	11:39:17 AM	Helium valve closed
4/1/2011	11:39:17 AM	BCl3 valve closed
4/1/2011	11:39:17 AM	PH3 valve closed
4/1/2011	11:39:17 AM	SiCl4 pre valve closed
4/1/2011	11:39:17 AM	SiCl4 post valve closed
4/1/2011	11:39:17 AM	Main Vac valve closed
4/1/2011	11:39:17 AM	Bypass valve closed
4/1/2011	11:39:17 AM	H2 valve opened
4/1/2011	11:39:17 AM	Bubbler valve opened
4/1/2011	11:39:17 AM	Helium MFC set to  0.000000
4/1/2011	11:39:17 AM	H2 MFC set to  500.000000
4/1/2011	11:39:17 AM	BCl3 MFC set to  0.000000
4/1/2011	11:39:17 AM	PHl3 MFC set to  0.000000
4/1/2011	11:39:17 AM	SiCl4 MFC set to  0.000000
4/1/2011	11:39:17 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:39:18 AM	Tube furnace set to 1000
4/1/2011	11:59:18 AM	Helium valve closed
4/1/2011	11:59:18 AM	PH3 valve closed
4/1/2011	11:59:18 AM	Main Vac valve closed
4/1/2011	11:59:18 AM	Bypass valve closed
4/1/2011	11:59:18 AM	H2 valve opened
4/1/2011	11:59:18 AM	BCl3 valve opened
4/1/2011	11:59:18 AM	SiCl4 pre valve opened
4/1/2011	11:59:18 AM	SiCl4 post valve opened
4/1/2011	11:59:18 AM	Bubbler valve opened
4/1/2011	11:59:18 AM	Helium MFC set to  0.000000
4/1/2011	11:59:18 AM	H2 MFC set to  500.000000
4/1/2011	11:59:18 AM	BCl3 MFC set to  3.000000
4/1/2011	11:59:18 AM	PHl3 MFC set to  0.000000
4/1/2011	11:59:18 AM	SiCl4 MFC set to  50.000000
4/1/2011	11:59:18 AM	Bypass solenoid MFC set to  0.000000
4/1/2011	11:59:18 AM	Tube furnace set to 1000
4/1/2011	12:19:18 PM	H2 valve closed
4/1/2011	12:19:18 PM	BCl3 valve closed
4/1/2011	12:19:18 PM	PH3 valve closed
4/1/2011	12:19:18 PM	SiCl4 pre valve closed
4/1/2011	12:19:18 PM	SiCl4 post valve closed
4/1/2011	12:19:18 PM	Main Vac valve closed
4/1/2011	12:19:18 PM	Bypass valve closed
4/1/2011	12:19:18 PM	Helium valve opened
4/1/2011	12:19:18 PM	Bubbler valve opened
4/1/2011	12:19:18 PM	Helium MFC set to  500.000000
4/1/2011	12:19:18 PM	H2 MFC set to  0.000000
4/1/2011	12:19:18 PM	BCl3 MFC set to  0.000000
4/1/2011	12:19:18 PM	PHl3 MFC set to  0.000000
4/1/2011	12:19:18 PM	SiCl4 MFC set to  0.000000
4/1/2011	12:19:18 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	12:19:18 PM	Tube furnace set to 0
4/1/2011	12:39:18 PM	Helium valve closed
4/1/2011	12:39:18 PM	H2 valve closed
4/1/2011	12:39:18 PM	BCl3 valve closed
4/1/2011	12:39:18 PM	PH3 valve closed
4/1/2011	12:39:18 PM	SiCl4 pre valve closed
4/1/2011	12:39:18 PM	SiCl4 post valve closed
4/1/2011	12:39:18 PM	Main Vac valve closed
4/1/2011	12:39:18 PM	Bypass valve closed
4/1/2011	12:39:18 PM	Bubbler valve closed
4/1/2011	12:39:18 PM	Helium MFC set to  0.000000
4/1/2011	12:39:18 PM	H2 MFC set to  0.000000
4/1/2011	12:39:18 PM	BCl3 MFC set to  0.000000
4/1/2011	12:39:18 PM	PHl3 MFC set to  0.000000
4/1/2011	12:39:18 PM	SiCl4 MFC set to  0.000000
4/1/2011	12:39:18 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	12:39:18 PM	Tube furnace set to 0
4/1/2011	12:39:18 PM	Run finished at 12:39 PM
4/1/2011	1:12:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	1:12:19 PM	Recipe started at 1:12 PM
4/1/2011	1:12:19 PM	Helium valve closed
4/1/2011	1:12:19 PM	H2 valve closed
4/1/2011	1:12:19 PM	BCl3 valve closed
4/1/2011	1:12:19 PM	PH3 valve closed
4/1/2011	1:12:19 PM	SiCl4 pre valve closed
4/1/2011	1:12:19 PM	SiCl4 post valve closed
4/1/2011	1:12:19 PM	Main Vac valve closed
4/1/2011	1:12:19 PM	Bubbler valve closed
4/1/2011	1:12:19 PM	Bypass valve opened
4/1/2011	1:12:19 PM	Helium MFC set to  0.000000
4/1/2011	1:12:19 PM	H2 MFC set to  0.000000
4/1/2011	1:12:19 PM	BCl3 MFC set to  0.000000
4/1/2011	1:12:19 PM	PHl3 MFC set to  0.000000
4/1/2011	1:12:19 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:12:19 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:12:19 PM	Tube furnace set to 0
4/1/2011	1:12:52 PM	Helium valve closed
4/1/2011	1:12:52 PM	H2 valve closed
4/1/2011	1:12:52 PM	BCl3 valve closed
4/1/2011	1:12:52 PM	PH3 valve closed
4/1/2011	1:12:52 PM	SiCl4 pre valve closed
4/1/2011	1:12:52 PM	SiCl4 post valve closed
4/1/2011	1:12:52 PM	Bubbler valve closed
4/1/2011	1:12:52 PM	Main Vac valve opened
4/1/2011	1:12:52 PM	Bypass valve opened
4/1/2011	1:12:52 PM	Helium MFC set to  0.000000
4/1/2011	1:12:52 PM	H2 MFC set to  0.000000
4/1/2011	1:12:52 PM	BCl3 MFC set to  0.000000
4/1/2011	1:12:52 PM	PHl3 MFC set to  0.000000
4/1/2011	1:12:52 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:12:52 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:12:53 PM	Tube furnace set to 0
4/1/2011	1:13:53 PM	H2 valve closed
4/1/2011	1:13:53 PM	BCl3 valve closed
4/1/2011	1:13:53 PM	PH3 valve closed
4/1/2011	1:13:53 PM	SiCl4 pre valve closed
4/1/2011	1:13:53 PM	SiCl4 post valve closed
4/1/2011	1:13:53 PM	Bubbler valve closed
4/1/2011	1:13:53 PM	Helium valve opened
4/1/2011	1:13:53 PM	Main Vac valve opened
4/1/2011	1:13:53 PM	Bypass valve opened
4/1/2011	1:13:53 PM	Helium MFC set to  100.000000
4/1/2011	1:13:53 PM	H2 MFC set to  0.000000
4/1/2011	1:13:53 PM	BCl3 MFC set to  0.000000
4/1/2011	1:13:53 PM	PHl3 MFC set to  0.000000
4/1/2011	1:13:53 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:13:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:13:53 PM	Tube furnace set to 0
4/1/2011	1:14:53 PM	Helium valve closed
4/1/2011	1:14:53 PM	H2 valve closed
4/1/2011	1:14:53 PM	BCl3 valve closed
4/1/2011	1:14:53 PM	PH3 valve closed
4/1/2011	1:14:53 PM	SiCl4 pre valve closed
4/1/2011	1:14:53 PM	SiCl4 post valve closed
4/1/2011	1:14:53 PM	Bubbler valve closed
4/1/2011	1:14:53 PM	Main Vac valve opened
4/1/2011	1:14:53 PM	Bypass valve opened
4/1/2011	1:14:53 PM	Helium MFC set to  0.000000
4/1/2011	1:14:53 PM	H2 MFC set to  0.000000
4/1/2011	1:14:53 PM	BCl3 MFC set to  0.000000
4/1/2011	1:14:53 PM	PHl3 MFC set to  0.000000
4/1/2011	1:14:53 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:14:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:14:53 PM	Tube furnace set to 0
4/1/2011	1:15:53 PM	H2 valve closed
4/1/2011	1:15:53 PM	BCl3 valve closed
4/1/2011	1:15:53 PM	PH3 valve closed
4/1/2011	1:15:53 PM	SiCl4 pre valve closed
4/1/2011	1:15:53 PM	SiCl4 post valve closed
4/1/2011	1:15:53 PM	Bubbler valve closed
4/1/2011	1:15:53 PM	Helium valve opened
4/1/2011	1:15:53 PM	Main Vac valve opened
4/1/2011	1:15:53 PM	Bypass valve opened
4/1/2011	1:15:53 PM	Helium MFC set to  100.000000
4/1/2011	1:15:53 PM	H2 MFC set to  0.000000
4/1/2011	1:15:53 PM	BCl3 MFC set to  0.000000
4/1/2011	1:15:53 PM	PHl3 MFC set to  0.000000
4/1/2011	1:15:53 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:15:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:15:53 PM	Tube furnace set to 0
4/1/2011	1:16:53 PM	Helium valve closed
4/1/2011	1:16:53 PM	H2 valve closed
4/1/2011	1:16:53 PM	BCl3 valve closed
4/1/2011	1:16:53 PM	PH3 valve closed
4/1/2011	1:16:53 PM	SiCl4 pre valve closed
4/1/2011	1:16:53 PM	SiCl4 post valve closed
4/1/2011	1:16:53 PM	Bubbler valve closed
4/1/2011	1:16:53 PM	Main Vac valve opened
4/1/2011	1:16:53 PM	Bypass valve opened
4/1/2011	1:16:53 PM	Helium MFC set to  0.000000
4/1/2011	1:16:53 PM	H2 MFC set to  0.000000
4/1/2011	1:16:53 PM	BCl3 MFC set to  0.000000
4/1/2011	1:16:53 PM	PHl3 MFC set to  0.000000
4/1/2011	1:16:53 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:16:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:16:53 PM	Tube furnace set to 0
4/1/2011	1:17:53 PM	H2 valve closed
4/1/2011	1:17:53 PM	BCl3 valve closed
4/1/2011	1:17:53 PM	PH3 valve closed
4/1/2011	1:17:53 PM	SiCl4 pre valve closed
4/1/2011	1:17:53 PM	SiCl4 post valve closed
4/1/2011	1:17:53 PM	Bubbler valve closed
4/1/2011	1:17:53 PM	Helium valve opened
4/1/2011	1:17:53 PM	Main Vac valve opened
4/1/2011	1:17:53 PM	Bypass valve opened
4/1/2011	1:17:53 PM	Helium MFC set to  100.000000
4/1/2011	1:17:53 PM	H2 MFC set to  0.000000
4/1/2011	1:17:53 PM	BCl3 MFC set to  0.000000
4/1/2011	1:17:53 PM	PHl3 MFC set to  0.000000
4/1/2011	1:17:53 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:17:53 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:17:54 PM	Tube furnace set to 0
4/1/2011	1:18:54 PM	Helium valve closed
4/1/2011	1:18:54 PM	H2 valve closed
4/1/2011	1:18:54 PM	BCl3 valve closed
4/1/2011	1:18:54 PM	PH3 valve closed
4/1/2011	1:18:54 PM	SiCl4 pre valve closed
4/1/2011	1:18:54 PM	SiCl4 post valve closed
4/1/2011	1:18:54 PM	Bubbler valve closed
4/1/2011	1:18:54 PM	Main Vac valve opened
4/1/2011	1:18:54 PM	Bypass valve opened
4/1/2011	1:18:54 PM	Helium MFC set to  0.000000
4/1/2011	1:18:54 PM	H2 MFC set to  0.000000
4/1/2011	1:18:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:18:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:18:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:18:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:18:54 PM	Tube furnace set to 0
4/1/2011	1:19:54 PM	H2 valve closed
4/1/2011	1:19:54 PM	BCl3 valve closed
4/1/2011	1:19:54 PM	PH3 valve closed
4/1/2011	1:19:54 PM	SiCl4 pre valve closed
4/1/2011	1:19:54 PM	SiCl4 post valve closed
4/1/2011	1:19:54 PM	Bubbler valve closed
4/1/2011	1:19:54 PM	Helium valve opened
4/1/2011	1:19:54 PM	Main Vac valve opened
4/1/2011	1:19:54 PM	Bypass valve opened
4/1/2011	1:19:54 PM	Helium MFC set to  100.000000
4/1/2011	1:19:54 PM	H2 MFC set to  0.000000
4/1/2011	1:19:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:19:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:19:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:19:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:19:54 PM	Tube furnace set to 0
4/1/2011	1:20:54 PM	Helium valve closed
4/1/2011	1:20:54 PM	H2 valve closed
4/1/2011	1:20:54 PM	BCl3 valve closed
4/1/2011	1:20:54 PM	PH3 valve closed
4/1/2011	1:20:54 PM	SiCl4 pre valve closed
4/1/2011	1:20:54 PM	SiCl4 post valve closed
4/1/2011	1:20:54 PM	Bubbler valve closed
4/1/2011	1:20:54 PM	Main Vac valve opened
4/1/2011	1:20:54 PM	Bypass valve opened
4/1/2011	1:20:54 PM	Helium MFC set to  0.000000
4/1/2011	1:20:54 PM	H2 MFC set to  0.000000
4/1/2011	1:20:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:20:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:20:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:20:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:20:54 PM	Tube furnace set to 0
4/1/2011	1:21:54 PM	H2 valve closed
4/1/2011	1:21:54 PM	BCl3 valve closed
4/1/2011	1:21:54 PM	PH3 valve closed
4/1/2011	1:21:54 PM	SiCl4 pre valve closed
4/1/2011	1:21:54 PM	SiCl4 post valve closed
4/1/2011	1:21:54 PM	Bubbler valve closed
4/1/2011	1:21:54 PM	Helium valve opened
4/1/2011	1:21:54 PM	Main Vac valve opened
4/1/2011	1:21:54 PM	Bypass valve opened
4/1/2011	1:21:54 PM	Helium MFC set to  100.000000
4/1/2011	1:21:54 PM	H2 MFC set to  0.000000
4/1/2011	1:21:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:21:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:21:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:21:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:21:54 PM	Tube furnace set to 0
4/1/2011	1:22:54 PM	Helium valve closed
4/1/2011	1:22:54 PM	H2 valve closed
4/1/2011	1:22:54 PM	BCl3 valve closed
4/1/2011	1:22:54 PM	PH3 valve closed
4/1/2011	1:22:54 PM	SiCl4 pre valve closed
4/1/2011	1:22:54 PM	SiCl4 post valve closed
4/1/2011	1:22:54 PM	Bubbler valve closed
4/1/2011	1:22:54 PM	Main Vac valve opened
4/1/2011	1:22:54 PM	Bypass valve opened
4/1/2011	1:22:54 PM	Helium MFC set to  0.000000
4/1/2011	1:22:54 PM	H2 MFC set to  0.000000
4/1/2011	1:22:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:22:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:22:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:22:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:22:55 PM	Tube furnace set to 0
4/1/2011	1:23:55 PM	H2 valve closed
4/1/2011	1:23:55 PM	BCl3 valve closed
4/1/2011	1:23:55 PM	PH3 valve closed
4/1/2011	1:23:55 PM	SiCl4 pre valve closed
4/1/2011	1:23:55 PM	SiCl4 post valve closed
4/1/2011	1:23:55 PM	Bubbler valve closed
4/1/2011	1:23:55 PM	Helium valve opened
4/1/2011	1:23:55 PM	Main Vac valve opened
4/1/2011	1:23:55 PM	Bypass valve opened
4/1/2011	1:23:55 PM	Helium MFC set to  100.000000
4/1/2011	1:23:55 PM	H2 MFC set to  0.000000
4/1/2011	1:23:55 PM	BCl3 MFC set to  0.000000
4/1/2011	1:23:55 PM	PHl3 MFC set to  0.000000
4/1/2011	1:23:55 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:23:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:23:55 PM	Tube furnace set to 0
4/1/2011	1:24:55 PM	Helium valve closed
4/1/2011	1:24:55 PM	H2 valve closed
4/1/2011	1:24:55 PM	BCl3 valve closed
4/1/2011	1:24:55 PM	PH3 valve closed
4/1/2011	1:24:55 PM	SiCl4 pre valve closed
4/1/2011	1:24:55 PM	SiCl4 post valve closed
4/1/2011	1:24:55 PM	Bubbler valve closed
4/1/2011	1:24:55 PM	Main Vac valve opened
4/1/2011	1:24:55 PM	Bypass valve opened
4/1/2011	1:24:55 PM	Helium MFC set to  0.000000
4/1/2011	1:24:55 PM	H2 MFC set to  0.000000
4/1/2011	1:24:55 PM	BCl3 MFC set to  0.000000
4/1/2011	1:24:55 PM	PHl3 MFC set to  0.000000
4/1/2011	1:24:55 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:24:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:24:55 PM	Tube furnace set to 0
4/1/2011	1:25:55 PM	H2 valve closed
4/1/2011	1:25:55 PM	BCl3 valve closed
4/1/2011	1:25:55 PM	PH3 valve closed
4/1/2011	1:25:55 PM	SiCl4 pre valve closed
4/1/2011	1:25:55 PM	SiCl4 post valve closed
4/1/2011	1:25:55 PM	Bubbler valve closed
4/1/2011	1:25:55 PM	Helium valve opened
4/1/2011	1:25:55 PM	Main Vac valve opened
4/1/2011	1:25:55 PM	Bypass valve opened
4/1/2011	1:25:55 PM	Helium MFC set to  100.000000
4/1/2011	1:25:55 PM	H2 MFC set to  0.000000
4/1/2011	1:25:55 PM	BCl3 MFC set to  0.000000
4/1/2011	1:25:55 PM	PHl3 MFC set to  0.000000
4/1/2011	1:25:55 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:25:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:25:55 PM	Tube furnace set to 0
4/1/2011	1:26:55 PM	Helium valve closed
4/1/2011	1:26:55 PM	H2 valve closed
4/1/2011	1:26:55 PM	BCl3 valve closed
4/1/2011	1:26:55 PM	PH3 valve closed
4/1/2011	1:26:55 PM	SiCl4 pre valve closed
4/1/2011	1:26:55 PM	SiCl4 post valve closed
4/1/2011	1:26:55 PM	Bubbler valve closed
4/1/2011	1:26:55 PM	Main Vac valve opened
4/1/2011	1:26:55 PM	Bypass valve opened
4/1/2011	1:26:55 PM	Helium MFC set to  0.000000
4/1/2011	1:26:55 PM	H2 MFC set to  0.000000
4/1/2011	1:26:55 PM	BCl3 MFC set to  0.000000
4/1/2011	1:26:55 PM	PHl3 MFC set to  0.000000
4/1/2011	1:26:55 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:26:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:26:55 PM	Tube furnace set to 0
4/1/2011	1:27:55 PM	H2 valve closed
4/1/2011	1:27:55 PM	BCl3 valve closed
4/1/2011	1:27:55 PM	PH3 valve closed
4/1/2011	1:27:55 PM	SiCl4 pre valve closed
4/1/2011	1:27:55 PM	SiCl4 post valve closed
4/1/2011	1:27:55 PM	Bubbler valve closed
4/1/2011	1:27:55 PM	Helium valve opened
4/1/2011	1:27:55 PM	Main Vac valve opened
4/1/2011	1:27:55 PM	Bypass valve opened
4/1/2011	1:27:55 PM	Helium MFC set to  100.000000
4/1/2011	1:27:55 PM	H2 MFC set to  0.000000
4/1/2011	1:27:55 PM	BCl3 MFC set to  0.000000
4/1/2011	1:27:55 PM	PHl3 MFC set to  0.000000
4/1/2011	1:27:55 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:27:55 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:27:56 PM	Tube furnace set to 0
4/1/2011	1:28:56 PM	Helium valve closed
4/1/2011	1:28:56 PM	H2 valve closed
4/1/2011	1:28:56 PM	BCl3 valve closed
4/1/2011	1:28:56 PM	PH3 valve closed
4/1/2011	1:28:56 PM	SiCl4 pre valve closed
4/1/2011	1:28:56 PM	SiCl4 post valve closed
4/1/2011	1:28:56 PM	Bubbler valve closed
4/1/2011	1:28:56 PM	Main Vac valve opened
4/1/2011	1:28:56 PM	Bypass valve opened
4/1/2011	1:28:56 PM	Helium MFC set to  0.000000
4/1/2011	1:28:56 PM	H2 MFC set to  0.000000
4/1/2011	1:28:56 PM	BCl3 MFC set to  0.000000
4/1/2011	1:28:56 PM	PHl3 MFC set to  0.000000
4/1/2011	1:28:56 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:28:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:28:56 PM	Tube furnace set to 0
4/1/2011	1:29:56 PM	H2 valve closed
4/1/2011	1:29:56 PM	BCl3 valve closed
4/1/2011	1:29:56 PM	PH3 valve closed
4/1/2011	1:29:56 PM	SiCl4 pre valve closed
4/1/2011	1:29:56 PM	SiCl4 post valve closed
4/1/2011	1:29:56 PM	Bubbler valve closed
4/1/2011	1:29:56 PM	Helium valve opened
4/1/2011	1:29:56 PM	Main Vac valve opened
4/1/2011	1:29:56 PM	Bypass valve opened
4/1/2011	1:29:56 PM	Helium MFC set to  100.000000
4/1/2011	1:29:56 PM	H2 MFC set to  0.000000
4/1/2011	1:29:56 PM	BCl3 MFC set to  0.000000
4/1/2011	1:29:56 PM	PHl3 MFC set to  0.000000
4/1/2011	1:29:56 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:29:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:29:56 PM	Tube furnace set to 0
4/1/2011	1:30:56 PM	Helium valve closed
4/1/2011	1:30:56 PM	H2 valve closed
4/1/2011	1:30:56 PM	BCl3 valve closed
4/1/2011	1:30:56 PM	PH3 valve closed
4/1/2011	1:30:56 PM	SiCl4 pre valve closed
4/1/2011	1:30:56 PM	SiCl4 post valve closed
4/1/2011	1:30:56 PM	Bubbler valve closed
4/1/2011	1:30:56 PM	Main Vac valve opened
4/1/2011	1:30:56 PM	Bypass valve opened
4/1/2011	1:30:56 PM	Helium MFC set to  0.000000
4/1/2011	1:30:56 PM	H2 MFC set to  0.000000
4/1/2011	1:30:56 PM	BCl3 MFC set to  0.000000
4/1/2011	1:30:56 PM	PHl3 MFC set to  0.000000
4/1/2011	1:30:56 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:30:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:30:56 PM	Tube furnace set to 0
4/1/2011	1:31:56 PM	H2 valve closed
4/1/2011	1:31:56 PM	BCl3 valve closed
4/1/2011	1:31:56 PM	PH3 valve closed
4/1/2011	1:31:56 PM	SiCl4 pre valve closed
4/1/2011	1:31:56 PM	SiCl4 post valve closed
4/1/2011	1:31:56 PM	Bubbler valve closed
4/1/2011	1:31:56 PM	Helium valve opened
4/1/2011	1:31:56 PM	Main Vac valve opened
4/1/2011	1:31:56 PM	Bypass valve opened
4/1/2011	1:31:56 PM	Helium MFC set to  100.000000
4/1/2011	1:31:56 PM	H2 MFC set to  0.000000
4/1/2011	1:31:56 PM	BCl3 MFC set to  0.000000
4/1/2011	1:31:56 PM	PHl3 MFC set to  0.000000
4/1/2011	1:31:56 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:31:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:31:56 PM	Tube furnace set to 0
4/1/2011	1:32:56 PM	Helium valve closed
4/1/2011	1:32:56 PM	H2 valve closed
4/1/2011	1:32:56 PM	BCl3 valve closed
4/1/2011	1:32:56 PM	PH3 valve closed
4/1/2011	1:32:56 PM	SiCl4 pre valve closed
4/1/2011	1:32:56 PM	SiCl4 post valve closed
4/1/2011	1:32:56 PM	Bubbler valve closed
4/1/2011	1:32:56 PM	Main Vac valve opened
4/1/2011	1:32:56 PM	Bypass valve opened
4/1/2011	1:32:56 PM	Helium MFC set to  0.000000
4/1/2011	1:32:56 PM	H2 MFC set to  0.000000
4/1/2011	1:32:56 PM	BCl3 MFC set to  0.000000
4/1/2011	1:32:56 PM	PHl3 MFC set to  0.000000
4/1/2011	1:32:56 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:32:56 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:32:57 PM	Tube furnace set to 0
4/1/2011	1:32:58 PM	Run finished at 1:32 PM
4/1/2011	1:32:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
4/1/2011	1:59:54 PM	Recipe started at 1:59 PM
4/1/2011	1:59:54 PM	Helium valve closed
4/1/2011	1:59:54 PM	BCl3 valve closed
4/1/2011	1:59:54 PM	PH3 valve closed
4/1/2011	1:59:54 PM	SiCl4 pre valve closed
4/1/2011	1:59:54 PM	SiCl4 post valve closed
4/1/2011	1:59:54 PM	Main Vac valve closed
4/1/2011	1:59:54 PM	Bypass valve closed
4/1/2011	1:59:54 PM	Bubbler valve closed
4/1/2011	1:59:54 PM	H2 valve opened
4/1/2011	1:59:54 PM	Helium MFC set to  0.000000
4/1/2011	1:59:54 PM	H2 MFC set to  500.000000
4/1/2011	1:59:54 PM	BCl3 MFC set to  0.000000
4/1/2011	1:59:54 PM	PHl3 MFC set to  0.000000
4/1/2011	1:59:54 PM	SiCl4 MFC set to  0.000000
4/1/2011	1:59:54 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	1:59:55 PM	Tube furnace set to 0
4/1/2011	2:01:15 PM	Helium valve closed
4/1/2011	2:01:15 PM	BCl3 valve closed
4/1/2011	2:01:15 PM	PH3 valve closed
4/1/2011	2:01:15 PM	SiCl4 pre valve closed
4/1/2011	2:01:15 PM	SiCl4 post valve closed
4/1/2011	2:01:15 PM	Main Vac valve closed
4/1/2011	2:01:15 PM	Bypass valve closed
4/1/2011	2:01:15 PM	H2 valve opened
4/1/2011	2:01:15 PM	Bubbler valve opened
4/1/2011	2:01:15 PM	Helium MFC set to  0.000000
4/1/2011	2:01:15 PM	H2 MFC set to  500.000000
4/1/2011	2:01:15 PM	BCl3 MFC set to  0.000000
4/1/2011	2:01:15 PM	PHl3 MFC set to  0.000000
4/1/2011	2:01:15 PM	SiCl4 MFC set to  0.000000
4/1/2011	2:01:15 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	2:01:15 PM	Tube furnace set to 1000
4/1/2011	2:21:15 PM	Helium valve closed
4/1/2011	2:21:15 PM	PH3 valve closed
4/1/2011	2:21:15 PM	Main Vac valve closed
4/1/2011	2:21:15 PM	Bypass valve closed
4/1/2011	2:21:15 PM	H2 valve opened
4/1/2011	2:21:15 PM	BCl3 valve opened
4/1/2011	2:21:15 PM	SiCl4 pre valve opened
4/1/2011	2:21:15 PM	SiCl4 post valve opened
4/1/2011	2:21:15 PM	Bubbler valve opened
4/1/2011	2:21:15 PM	Helium MFC set to  0.000000
4/1/2011	2:21:15 PM	H2 MFC set to  500.000000
4/1/2011	2:21:15 PM	BCl3 MFC set to  3.000000
4/1/2011	2:21:15 PM	PHl3 MFC set to  0.000000
4/1/2011	2:21:15 PM	SiCl4 MFC set to  50.000000
4/1/2011	2:21:15 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	2:21:15 PM	Tube furnace set to 1000
4/1/2011	2:41:15 PM	H2 valve closed
4/1/2011	2:41:15 PM	BCl3 valve closed
4/1/2011	2:41:15 PM	PH3 valve closed
4/1/2011	2:41:15 PM	SiCl4 pre valve closed
4/1/2011	2:41:15 PM	SiCl4 post valve closed
4/1/2011	2:41:15 PM	Main Vac valve closed
4/1/2011	2:41:15 PM	Bypass valve closed
4/1/2011	2:41:15 PM	Helium valve opened
4/1/2011	2:41:15 PM	Bubbler valve opened
4/1/2011	2:41:15 PM	Helium MFC set to  500.000000
4/1/2011	2:41:15 PM	H2 MFC set to  0.000000
4/1/2011	2:41:15 PM	BCl3 MFC set to  0.000000
4/1/2011	2:41:15 PM	PHl3 MFC set to  0.000000
4/1/2011	2:41:15 PM	SiCl4 MFC set to  0.000000
4/1/2011	2:41:15 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	2:41:16 PM	Tube furnace set to 0
4/1/2011	3:01:16 PM	Helium valve closed
4/1/2011	3:01:16 PM	H2 valve closed
4/1/2011	3:01:16 PM	BCl3 valve closed
4/1/2011	3:01:16 PM	PH3 valve closed
4/1/2011	3:01:16 PM	SiCl4 pre valve closed
4/1/2011	3:01:16 PM	SiCl4 post valve closed
4/1/2011	3:01:16 PM	Main Vac valve closed
4/1/2011	3:01:16 PM	Bypass valve closed
4/1/2011	3:01:16 PM	Bubbler valve closed
4/1/2011	3:01:16 PM	Helium MFC set to  0.000000
4/1/2011	3:01:16 PM	H2 MFC set to  0.000000
4/1/2011	3:01:16 PM	BCl3 MFC set to  0.000000
4/1/2011	3:01:16 PM	PHl3 MFC set to  0.000000
4/1/2011	3:01:16 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:01:16 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:01:16 PM	Tube furnace set to 0
4/1/2011	3:01:16 PM	Run finished at 3:01 PM
4/1/2011	3:09:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	3:09:41 PM	Recipe started at 3:09 PM
4/1/2011	3:09:41 PM	H2 valve closed
4/1/2011	3:09:41 PM	BCl3 valve closed
4/1/2011	3:09:41 PM	PH3 valve closed
4/1/2011	3:09:41 PM	SiCl4 pre valve closed
4/1/2011	3:09:41 PM	SiCl4 post valve closed
4/1/2011	3:09:41 PM	Main Vac valve closed
4/1/2011	3:09:41 PM	Bypass valve closed
4/1/2011	3:09:41 PM	Bubbler valve closed
4/1/2011	3:09:41 PM	Helium valve opened
4/1/2011	3:09:41 PM	Helium MFC set to  500.000000
4/1/2011	3:09:41 PM	H2 MFC set to  0.000000
4/1/2011	3:09:41 PM	BCl3 MFC set to  0.000000
4/1/2011	3:09:42 PM	PHl3 MFC set to  0.000000
4/1/2011	3:09:42 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:09:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:09:42 PM	Tube furnace set to 0
4/1/2011	3:09:42 PM	Helium valve closed
4/1/2011	3:09:42 PM	H2 valve closed
4/1/2011	3:09:42 PM	BCl3 valve closed
4/1/2011	3:09:42 PM	PH3 valve closed
4/1/2011	3:09:42 PM	SiCl4 pre valve closed
4/1/2011	3:09:42 PM	SiCl4 post valve closed
4/1/2011	3:09:42 PM	Main Vac valve closed
4/1/2011	3:09:42 PM	Bypass valve closed
4/1/2011	3:09:42 PM	Bubbler valve closed
4/1/2011	3:09:42 PM	Helium MFC set to  0.000000
4/1/2011	3:09:42 PM	H2 MFC set to  0.000000
4/1/2011	3:09:42 PM	BCl3 MFC set to  0.000000
4/1/2011	3:09:42 PM	PHl3 MFC set to  0.000000
4/1/2011	3:09:42 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:09:42 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:09:42 PM	Tube furnace set to 0
4/1/2011	3:09:43 PM	Run finished at 3:09 PM
4/1/2011	3:09:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	3:10:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	3:10:16 PM	Recipe started at 3:10 PM
4/1/2011	3:10:16 PM	H2 valve closed
4/1/2011	3:10:16 PM	BCl3 valve closed
4/1/2011	3:10:16 PM	PH3 valve closed
4/1/2011	3:10:16 PM	SiCl4 pre valve closed
4/1/2011	3:10:16 PM	SiCl4 post valve closed
4/1/2011	3:10:16 PM	Main Vac valve closed
4/1/2011	3:10:16 PM	Bypass valve closed
4/1/2011	3:10:16 PM	Bubbler valve closed
4/1/2011	3:10:16 PM	Helium valve opened
4/1/2011	3:10:16 PM	Helium MFC set to  500.000000
4/1/2011	3:10:16 PM	H2 MFC set to  0.000000
4/1/2011	3:10:16 PM	BCl3 MFC set to  0.000000
4/1/2011	3:10:16 PM	PHl3 MFC set to  0.000000
4/1/2011	3:10:16 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:10:16 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:10:16 PM	Tube furnace set to 0
4/1/2011	3:10:16 PM	Helium valve closed
4/1/2011	3:10:16 PM	H2 valve closed
4/1/2011	3:10:16 PM	BCl3 valve closed
4/1/2011	3:10:16 PM	PH3 valve closed
4/1/2011	3:10:16 PM	SiCl4 pre valve closed
4/1/2011	3:10:16 PM	SiCl4 post valve closed
4/1/2011	3:10:16 PM	Main Vac valve closed
4/1/2011	3:10:16 PM	Bypass valve closed
4/1/2011	3:10:16 PM	Bubbler valve closed
4/1/2011	3:10:16 PM	Helium MFC set to  0.000000
4/1/2011	3:10:16 PM	H2 MFC set to  0.000000
4/1/2011	3:10:16 PM	BCl3 MFC set to  0.000000
4/1/2011	3:10:16 PM	PHl3 MFC set to  0.000000
4/1/2011	3:10:16 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:10:16 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:10:16 PM	Tube furnace set to 0
4/1/2011	3:10:17 PM	Run finished at 3:10 PM
4/1/2011	3:10:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/1/2011	3:10:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/1/2011	3:10:33 PM	Recipe started at 3:10 PM
4/1/2011	3:10:33 PM	Helium valve closed
4/1/2011	3:10:33 PM	H2 valve closed
4/1/2011	3:10:33 PM	BCl3 valve closed
4/1/2011	3:10:33 PM	PH3 valve closed
4/1/2011	3:10:33 PM	SiCl4 pre valve closed
4/1/2011	3:10:33 PM	SiCl4 post valve closed
4/1/2011	3:10:33 PM	Main Vac valve closed
4/1/2011	3:10:33 PM	Bubbler valve closed
4/1/2011	3:10:33 PM	Bypass valve opened
4/1/2011	3:10:33 PM	Helium MFC set to  0.000000
4/1/2011	3:10:33 PM	H2 MFC set to  0.000000
4/1/2011	3:10:33 PM	BCl3 MFC set to  0.000000
4/1/2011	3:10:33 PM	PHl3 MFC set to  0.000000
4/1/2011	3:10:33 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:10:33 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:10:33 PM	Tube furnace set to 0
4/1/2011	3:11:04 PM	Helium valve closed
4/1/2011	3:11:04 PM	H2 valve closed
4/1/2011	3:11:04 PM	BCl3 valve closed
4/1/2011	3:11:04 PM	PH3 valve closed
4/1/2011	3:11:04 PM	SiCl4 pre valve closed
4/1/2011	3:11:04 PM	SiCl4 post valve closed
4/1/2011	3:11:04 PM	Bubbler valve closed
4/1/2011	3:11:04 PM	Main Vac valve opened
4/1/2011	3:11:04 PM	Bypass valve opened
4/1/2011	3:11:04 PM	Helium MFC set to  0.000000
4/1/2011	3:11:04 PM	H2 MFC set to  0.000000
4/1/2011	3:11:04 PM	BCl3 MFC set to  0.000000
4/1/2011	3:11:04 PM	PHl3 MFC set to  0.000000
4/1/2011	3:11:04 PM	SiCl4 MFC set to  0.000000
4/1/2011	3:11:04 PM	Bypass solenoid MFC set to  0.000000
4/1/2011	3:11:04 PM	Tube furnace set to 0
4/1/2011	3:11:05 PM	Run finished at 3:11 PM
4/1/2011	3:11:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
